EPIC Control System

EPI EPIC EPITAXY EPSILON

EPIC is a modern, robust, high-performance control system

EPIC has been in production at various global sites around the world since 2015

EPIC is an OEM qualified drop-in replacement for the obsolete Gespac controller

Minimal retrofit downtime (1-2 days Green-to-Green)

EPI EPIC EPITAXY EPSILON

State-of-the-art hardware from industry leading suppliers

Excellent warranty, reliability and continuity

​Reasonably priced and readily available spares

EPI EPIC EPITAXY EPSILON

Cutting edge software designed for maximum performance and stability

Modern touch-based UI with similar look and feel to legacy

Minimal user training requirements

Windows 10 with excellent connectivity and user experience​
Recipe file management and transfer with modern media
Enhanced user management and access control

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Full SECS/GEM Factory Automation interface

Up to date with current SEMI standards

Full support for all legacy features and more

Seamless transition with integration support

Interface customization per customer request

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Full equipment history for parameters and events

All tool settings, parameters, I/O measurement and events stored automatically

​High-performance SQL database, 250+ GB solid state disk

Live or historical data charting, plotting and lookup

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Integrated temperature control option

Built-in advanced PID temperature and SCR control

Foxboro controllers can be bypassed or eliminated completely

Linear SCR upgrade with recipe-based SCR ratio control
Tool-to-tool matching and recipe encoded process ratio set

Continuous lamp monitoring and checking

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Remote monitoring and control option

Monitor and/or control your tool from outside of the cleanroom

Transfer tool data and/or recipes from the convenience of your desk

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Easy tool software and data management

Easy tool backup and restore with on-screen wizard

Easy 10 minute software updates with on-screen wizard

All fab IT update and security policies supported

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Continuous improvement and support

Quarterly software updates with new features and improvements

Quick response from expert engineers

Custom development for new features per client request Enhanced capabilities, not offered with the legacy GESPAC controller

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Realistic equipment simulation

Convenient ​EPIC Simulator tablets available

Realistic tool simulation for operator training

Off-line recipe editing
SECS/GEM interface integration and testing